|
|
|
Applications>> |
|
|
|
Interferometry |
|
|
|
A laser interferometer is an instrument that
performs high-precision measurements based on the principle of optical
interference. Its core working principle involves the superposition of two or
more beams of coherent light to form interference fringes; by analyzing changes
in these fringes, physical quantities such as length, displacement, surface
topography, and refractive index can be measured.
1. The Basic
Principles of Laser Interference
Interference conditions:
Two
light beams must satisfy coherence (temporal coherence and spatial
coherence).The optical path difference must be less than the coherence length of
the laser (ΔL < Lc), where ΔL denotes the optical path difference and Lc denotes
the coherence length.
Interference formula:
Light intensity distribution I = I₁ + I₂ + 2√(I₁I₂)cos
(∆ф) where ∆ф = 2π/λ
ΔL represents the phase difference. Each movement of the interference fringes
corresponds to a change in optical path difference by one wavelength.
λ) .
2. Classification
of Laser Interferometers
2.1
Classification by Optical Path Structure
(1) Michelson Interferometer
Principle: A beam splitter divides the laser into a reference beam and a
measurement beam. After being reflected, the two beams recombine to produce
interference. Featuring a simple structure, this setup is suitable for
displacement measurement (e.g., LIGO gravitational wave detection). |
 |
|
Michael Interferometer
Schematic |
|
|
(2)
Mach-Zehnder Interferometer
Principle: Two beams of light travel along independent paths without using
mirrors, making it ideal for measuring changes in refractive index (such as
fluid flow velocity or plasma diagnostics). |
 |
|
Principle Diagram of a Mach-Zehnder
Interferometer |
|
|
(3)
Fabry-Perot Interferometer
Principle: Multi-beam interference, high finesse, used for spectral analysis or
laser cavity length control. |
 |
|
Principle Diagram of a Fabry-Perot
Interferometer |
|
|
(4)
Fizeau Interferometer
Principle: This method utilizes direct light interference between the surface
under test and a reference plane, making it suitable for optical surface
flatness inspection. |
 |
|
Fizeau Interferometer
Schematic |
|
|
2.2
Categorized by Measurement Object
(1) Displacement/Length Interferometer
Measure target displacement with nanometer-level precision, such as for machine
tool guide rail calibration.
(2) Wavefront/Shape Interferometer
Detect surface errors of optical components (such as lenses and mirrors with
λ/10 accuracy).
(3) Refractive Index/Gas Interferometer
By
inverting the medium's refractive index based on changes in optical path
difference, such as air refractive index compensation.
2.3 Classification by Signal Processing Method
(1) Zero-Offset Interferometer
Directly detecting the interference light intensity is structurally simple but
easily affected by noise.
(2) Heterodyne Interferometer
By
introducing a frequency difference (such as in acousto-optic modulation), the
anti-interference capability can be enhanced through beat-frequency signals—for
example, in precision positioning applications within semiconductor
manufacturing.
3. Typical
Application Areas
3.1 Industrial Manufacturing and Metrology
Position feedback for CNC machines and lithography equipment (nanometer-level
repeat positioning accuracy).
Optical component surface shape inspection (e.g., telescope lenses, smartphone
camera modules). |
 |
|
CNC machine tool repeat
positioning with a laser interferometer |
|
|
|
|
3.2 Scientific
Research
Gravitational wave
detection (Michelson interferometer).
Plasma Density Measurement
(Mach-Zehnder Interferometer). |
 |
|
Laser Interferometer
Gravitational-Wave Observatory (LIGO) |
|
|
3.3
Biomedical
Optical Coherence Tomography (OCT) uses low-coherence light interference to
achieve micrometer-level imaging of biological tissues. |
 |
|
Laser Interference Optical
Coherence Tomography |
|
|
3.4
Environmental Monitoring
Atmospheric turbulence analysis, gas concentration detection (via refractive
index changes). |
 |
|
Laser Interference Optical
Coherence Tomography |
|
|
3.5
Semiconductor Industry
Wafer thickness measurement, lithography alignment (dual-frequency laser
interferometer). |
 |
|
Research on Lithographic
Alignment Using Laser Interferometers |
|
|
|
|
4. CNI's Typical
Interference Laser System |
|
|
|
CNI offers highly reliable, narrow-linewidth,
single-longitudinal-mode (single-frequency) lasers that feature stable mode
operation, long coherence length, low noise, and excellent beam quality—making
them the ideal choice for interference applications.
For
detailed information, please visit
www.cnilaser.com. |
 |
|
|
|
Laser interferometers, with their
ingenious optical path design and advanced
signal processing techniques, achieve
ultra-precise measurements spanning from
macroscopic to microscopic scales. Their
applications extend across high-end fields such
as industry, scientific research, and
healthcare, and they are poised for further
advancements toward higher precision, enhanced
anti-interference capabilities, and
multifunctional versatility in the future. |
|
|
|
|
|